X-ray metrology in semiconductor manufacturing
D. Keith Bowen, Brian K. Tanner
Written by established world experts, X-Ray Metrology in Semiconductor Manufacturing describes the applications, science, and technology of this rapidly evolving area. This book emphasizes practical metrology, with real world examples from the semiconductor and magnetics industries. The authors discuss the techniques, theory, and applications of X-ray metrology in semiconductors and other advanced thin films. The book covers the essential metrological questions of precision and repeatability, absolute accuracy, spot size, and throughput for each type of measurement. This text contains important information for electrical engineers, fabrication engineers, and semiconductor engineers.
კატეგორია:
წელი:
2006
გამოცემა:
1
გამომცემლობა:
CRC/Taylor & Francis
ენა:
english
გვერდები:
273
ISBN 10:
1420005650
ISBN 13:
9781420005653
ფაილი:
PDF, 10.48 MB
IPFS:
,
english, 2006